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[IEEE 2008 IEEE International Conference on Semiconductor Electronics (ICSE) - Johor Bahru, Malaysia (2008.11.25-2008.11.27)] 2008 IEEE International Conference on Semiconductor Electronics - Time optimized implantation modeling for accurate process simulation
Sankar, G. Kulathu, Kumar Pal, Deb, Elizabeth Kho Ching Tee,, Tia Swee Hua,Year:
2008
Language:
english
DOI:
10.1109/smelec.2008.4770272
File:
PDF, 2.73 MB
english, 2008