[IEEE MHS'98. 1998 International Symposium on Micromechatronics and Human Science - Nagoya, Japan (25-28 Nov. 1998)] MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) - A PZT-driven micropump

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