Siliconized silsesquioxane-based nonstick molds for...

Journal of Materials Chemistry 2012 Vol. 22; Iss. 33

Siliconized silsesquioxane-based nonstick molds for ultrahigh-resolution lithography

Lee, Bong Kuk, Park, Kun-Sik, Kim, Dong-Pyo, Ryu, Jin-Hwa, Park, Jaehoon, Jeong, Ye-Sul, Baek, Kyu-Ha, Do, Lee-Mi
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Volume:
22
Year:
2012
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/c2jm32386a
File:
PDF, 3.12 MB
english, 2012
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