Carbon and Tungsten Sputtering in a Helium Magnetron...

IEEE Transactions on Plasma Science 2009 / 08 Vol. 37; Iss. 8

Carbon and Tungsten Sputtering in a Helium Magnetron Discharge

Tiron, V., Andrei, C., Nastuta, A.V., Rusu, G.B., Vitelaru, C., Popa, G.
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Volume:
37
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2009.2024421
Date:
August, 2009
File:
PDF, 885 KB
english, 2009
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