W-Shaped Cantilevers for Scanning Force Microscopy
Le Rouzic, Julian, Vairac, Pascal, Cavallier, Bruno, Cretin, BernardVolume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2012.2232784
Date:
April, 2013
File:
PDF, 1.34 MB
english, 2013