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[IEEE 1998 IEEE AUTOTESTCON Proceedings. IEEE Systems Readiness Technology Conference. Test Technology for the 21st Century (Cat. No.98CH36179) - Salt Lake City, UT, USA (24-27 Aug. 1998)] 1998 IEEE AUTOTESTCON Proceedings. IEEE Systems Readiness Technology Conference. Test Technology for the 21st Century (Cat. No.98CH36179) - Challenges of MEMS device characterization in engineering development and final manufacturing
Maudie, T., Miller, T., Nielsen, R., Wallace, D., Ruehs, T., Zehrbach, D.Year:
1998
Language:
english
DOI:
10.1109/autest.1998.713439
File:
PDF, 668 KB
english, 1998