[IEEE 2013 26th International Vacuum Nanoelectronics Conference (IVNC) - Roanoke, VA (2013.7.8-2013.7.12)] 2013 26th International Vacuum Nanoelectronics Conference (IVNC) - High vacuum micropump for miniature nanoelectronics devices
Grzebyk, Tomasz, Gorecka-Drzazga, Anna, Dziuban, Jan A.Year:
2013
Language:
english
DOI:
10.1109/ivnc.2013.6624736
File:
PDF, 443 KB
english, 2013