[IEEE 2007 Spanish Conference on Electron Devices - Madrid, Spain (2007.01.31-2007.02.2)] 2007 Spanish Conference on Electron Devices - Physics based models for process optimization
Pelaz, Lourdes, Marques, Luis A., Aboy, Maria, Lopez, Pedro, Santos, IvanYear:
2007
Language:
english
DOI:
10.1109/sced.2007.383983
File:
PDF, 1.96 MB
english, 2007