Gas Cluster Ion Beam Equipment and Applications for Surface...

IEEE Transactions on Plasma Science 2008 / 08 Vol. 36; Iss. 4

Gas Cluster Ion Beam Equipment and Applications for Surface Processing

Toyoda, Noriaki, Yamada, Isao
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Volume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2008.927266
Date:
August, 2008
File:
PDF, 2.57 MB
english, 2008
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