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[IEEE Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 - Taiwan (5-8 July 2004)] Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743) - The leakage current study on Cu/TaSi/sub x//porous silica damascene structures
Chung-Hsien Chen,, Fon-Shan Huang,Year:
2004
Language:
english
DOI:
10.1109/ipfa.2004.1345543
File:
PDF, 276 KB
english, 2004