[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Adhesion-enhancing surface treatments for parylene deposition
Chang, Jay Han-Chieh, Lu, Bo, Tai, Yu-ChongYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969484
File:
PDF, 1.49 MB
english, 2011