Design and fabrication of a novel bimorph microoptomechanical sensor
Si-Hyung Lim,, Jongeun Choi,, Horowitz, R., Majumdar, A.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.845446
Date:
August, 2005
File:
PDF, 929 KB
english, 2005