[IEEE 2012 International Symposium on Computer, Consumer and Control (IS3C) - Taichung, Taiwan (2012.06.4-2012.06.6)] 2012 International Symposium on Computer, Consumer and Control - NH3 Plasma Treatment for Flash Memory on Poly-Si Thin Films
Lin, Yu-Hsien, You, Hsin-Chiang, Chou, Jay-Chi, Chou, Tung-Huan, Chao, Tien-ShengYear:
2012
Language:
english
DOI:
10.1109/is3c.2012.212
File:
PDF, 314 KB
english, 2012