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Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films
Chaoyang Wei, Degang Deng, Guanglei Tian, Hongbo He, Jianda Shao, Zhengxiu FanVolume:
119
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.ijleo.2007.04.005
File:
PDF, 326 KB
english, 2008