Etching blazed grating into quartz substrate with selectivity 1:1 against photoresist by inductively coupled plasma technology
Xiao-Dong Sun, Deng-Feng Kuang, Guo-Guang MuVolume:
122
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.ijleo.2010.03.005
File:
PDF, 532 KB
english, 2011