Etching blazed grating into quartz substrate with...

Etching blazed grating into quartz substrate with selectivity 1:1 against photoresist by inductively coupled plasma technology

Xiao-Dong Sun, Deng-Feng Kuang, Guo-Guang Mu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
122
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.ijleo.2010.03.005
File:
PDF, 532 KB
english, 2011
Conversion to is in progress
Conversion to is failed