Advances in micro ultrasonic assisted lapping of microstructures in hard–brittle materials: a brief review and outlook
C. Zhang, R. Rentsch, E. BrinksmeierVolume:
45
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.ijmachtools.2004.10.018
File:
PDF, 685 KB
english, 2005