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A grinding-based manufacturing method for silicon wafers: an experimental investigation
Z.J. Pei, Graham R. Fisher, Milind Bhagavat, S. KassirVolume:
45
Year:
2005
Language:
english
Pages:
12
DOI:
10.1016/j.ijmachtools.2004.12.006
File:
PDF, 712 KB
english, 2005