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Theoretical analysis on the effects of crystal anisotropy on wiresawing process and application to wafer slicing
Sumeet Bhagavat, Imin KaoVolume:
46
Year:
2006
Language:
english
Pages:
11
DOI:
10.1016/j.ijmachtools.2005.07.003
File:
PDF, 505 KB
english, 2006