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Surface characteristics of micro-ultrasonically machined (1 0 0) silicon
M.J. Klopfstein, R. Ghisleni, D.A. Lucca, E. BrinksmeierVolume:
48
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.ijmachtools.2007.10.008
File:
PDF, 260 KB
english, 2008