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Influence of Stress-Induced Leakage Current on Reliability of $\hbox{HfSiO}_{x}$
Jakschik, Stefan, Kauerauf, Thomas, Degraeve, R., Hwang, Y. N., Duschl, Rainer, Kerber, Martin, Avellan, Alejandro, Kudelka, S.Volume:
7
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2007.902201
Date:
June, 2007
File:
PDF, 444 KB
english, 2007