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[IEEE 2006 IEEE International Integrated Reliability Workshop Final Report - South Lake Tahoe, CA, USA (2006.10.16-2006.09.19)] 2006 IEEE International Integrated Reliability Workshop Final Report - The Correlation of Interface Defect Density and Power-Law Exponent Factor on Ultra-thin Gate Dielectric Reliability
Yang, Jeff, Lin, Cheng-li, Hu, Chan-yuan, Chen, Ju-ping, Kao, Chia-jen, Su, K.c.Year:
2006
Language:
english
DOI:
10.1109/irws.2006.305240
File:
PDF, 329 KB
english, 2006