A Dynamic Calibration Method for Pirani Gauges Embedded in Fluidic Networks
An, Seungdo, Gianchandani, Yogesh B.Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2281319
Date:
June, 2014
File:
PDF, 2.11 MB
english, 2014