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Finite element eddy current analysis in RF plasma devices with metal cooling system
Mckideche, M.R., Feliachi, M., Develey, G., Srairi, K.Volume:
33
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.582768
Date:
March, 1997
File:
PDF, 319 KB
english, 1997