[IEEE Thirteenth Biennial University/Government/Industry Microelectronics Symposium - Minneapolis, MN, USA (20-23 June 1999)] Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.99CH36301) - High permittivity gate insulators TiO/sub 2/ and ZrO/sub 2/
He, B., Hoilien, N., Smith, R., Ma, T., Taylor, C., St. Omer, I., Campbell, S.A., Gladfelter, W.L., Gribelyuk, M., Buchanan, D.Year:
1999
Language:
english
DOI:
10.1109/ugim.1999.782817
File:
PDF, 571 KB
english, 1999