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[IEEE SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Cambridge, MA, USA (13-15 Nov. 1995)] Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop - A yield based replacement for capability indexes
Abugov, R., Dietrich, X.J.Year:
1995
Language:
english
DOI:
10.1109/asmc.1995.484372
File:
PDF, 320 KB
english, 1995