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[IEEE IEEE Conference Record - Abstracts 1991 IEEE International Conference on Plasma Science - Williamsburg, VA, USA (3-5 June 1991)] IEEE Conference Record - Abstracts 1991 IEEE International Conference on Plasma Science - Silicon Nitride Thin Film Deposition Using ECR Plasma
Sun-Kyu Song,, Hong-Young Chang,Year:
1991
DOI:
10.1109/plasma.1991.695541
File:
PDF, 73 KB
1991