IR laser-induced decomposition of prop-2-enylsilane and...

IR laser-induced decomposition of prop-2-enylsilane and ethynylsilane for chemical vapour deposition of Si/C phases

Pola, Josef, Vítek, Josef, Bastl, Zdeněk, Urbanová, M., Šubrt, Jan, Taylor, Roger
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Volume:
7
Year:
1997
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/a700370f
File:
PDF, 567 KB
english, 1997
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