[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process

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