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[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Process integration technology for sub-30 ps ECL BiCMOS using heavily boron doped epitaxial contact (HYDEC)
Kinoshita, Y., Imai, K., Yoshida, H., Suzuki, H., Tatsumi, T., Yamazaki, T.Year:
1994
Language:
english
DOI:
10.1109/iedm.1994.383373
File:
PDF, 344 KB
english, 1994