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Tailoring phase and composition at the nanoscale: atomic layer deposition of Zn–Ti–O thin films
Borgese, Laura, Bontempi, Elza, Depero, Laura E., Colombi, Paolo, Alessandri, IvanoVolume:
13
Year:
2011
Language:
english
Journal:
CrystEngComm
DOI:
10.1039/c1ce05923h
File:
PDF, 316 KB
english, 2011