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[IEEE 1998 IEEE International SOI Conference Proceedings - Stuart, FL, USA (5-8 Oct. 1998)] 1998 IEEE International SOI Conference Proceedings (Cat No.98CH36199) - Kinetics of splitting in the Smart-Cut/sup R/ process
Aspar, B., Lagahe, C., Moriceau, H., Soubie, A., Bruel, M., Auberton-Herve, A.J., Barge, T., Maleville, C.Year:
1998
Language:
english
DOI:
10.1109/soi.1998.723149
File:
PDF, 263 KB
english, 1998