Frequency Trimming of Aluminum Nitride Microresonators...

Journal of Microelectromechanical Systems 2014 / 6 Vol. 23; Iss. 3

Frequency Trimming of Aluminum Nitride Microresonators Using Rapid Thermal Annealing

Henry, Michael David, Nguyen, Janet, Young, Travis Ryan, Bauer, Todd, Olsson, Roy H.
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2283801
Date:
June, 2014
File:
PDF, 1.36 MB
english, 2014
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