![](/img/cover-not-exists.png)
[IEEE Proceedings of International Reliability Physics Symposium - Dallas, TX, USA (1996.04.30-1996.05.2)] Proceedings of International Reliability Physics Symposium RELPHY-96 - Effects of insulator surface roughness on Al-alloy film properties and crystallographic orientation in Al-alloy/Ti/insulator structure
Onoda, H., Narita, T., Touchi, K., Hashimoto, K.Year:
1996
Language:
english
DOI:
10.1109/relphy.1996.492074
File:
PDF, 1.21 MB
english, 1996