Measurement of Adhesion Force by a Symmetric AFM Probe for Nano-imprint Lithography Application
Lee, Hee-Jung, Hyun, Seungmin, Kim, Jae-Hyun, Lee, Hak-Joo, Choi, Dae-Geun, Lee, Dong-II, Jeong, Jun-Ho, Lee, Eung-SugVolume:
22
Language:
english
Journal:
Journal of Adhesion Science and Technology
DOI:
10.1163/156856108X309567
Date:
January, 2008
File:
PDF, 651 KB
english, 2008