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Low-Temperature Microwave Annealing for MOSFETs With...

IEEE Electron Device Letters 2013 / 10 Vol. 34; Iss. 10

Low-Temperature Microwave Annealing for MOSFETs With High-k/Metal Gate Stacks

Lee, Yao-Jen, Tsai, Bo-An, Lai, Chiung-Hui, Chen, Zheng-Yao, Hsueh, Fu-Kuo, Sung, Po-Jung, Current, Michael I., Luo, Chih-Wei
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2279396
Date:
October, 2013
File:
PDF, 597 KB
english, 2013
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