[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes
Sainiemi, L., Viheriala, J., Laukkanen, J., Niemi, T., Franssila, S.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285528
File:
PDF, 1.01 MB
english, 2009