Transient Thermal Analysis of Sapphire Wafers Subjected to...

IEEE Transactions on Semiconductor Manufacturing 2006 / 08 Vol. 19; Iss. 3

Transient Thermal Analysis of Sapphire Wafers Subjected to Thermal Shocks

Vodenitcharova, T., Zhang, L.C., Zarudi, I., Yin, Y., Domyo, H., Ho, T.
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Volume:
19
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2006.879419
Date:
August, 2006
File:
PDF, 310 KB
english, 2006
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