[IEEE 2012 IEEE International Conference on IC Design &...

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[IEEE 2012 IEEE International Conference on IC Design & Technology (ICICDT) - Austin, TX, USA (2012.05.30-2012.06.1)] 2012 IEEE International Conference on IC Design & Technology - Optimization problems for plasma-induced damage - A concept for plasma-induced damage design

Eriguchi, Koji, Nakakubo, Yoshinori, Matsuda, Asahiko, Kamei, Masayuki, Takao, Yoshinori, Ono, Kouichi
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Year:
2012
Language:
english
DOI:
10.1109/icicdt.2012.6232840
File:
PDF, 747 KB
english, 2012
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