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[IEEE Thirteenth Biennial University/Government/Industry Microelectronics Symposium - Minneapolis, MN, USA (20-23 June 1999)] Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.99CH36301) - Ohio MEMSNet: an innovative approach to providing MEMS infrastructure
Melzak, J.M., Mehregany, M.Year:
1999
Language:
english
DOI:
10.1109/ugim.1999.782813
File:
PDF, 51 KB
english, 1999