Factors affecting photosensitivity enhancement of...

Factors affecting photosensitivity enhancement of chemically amplified photoresists by an acid amplifier

Arimitsu, Koji, Kudo, Kazuaki, Ohmori, Hironori, Ichimura, Kunihiro
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Volume:
11
Year:
2001
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/b007474h
File:
PDF, 219 KB
english, 2001
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