Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement Sensing
Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. RezaVolume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2240261
Date:
June, 2013
File:
PDF, 925 KB
english, 2013