[IEEE 2009 17th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Albany, NY, USA (2009.09.29-2009.10.2)] 2009 17th International Conference on Advanced Thermal Processing of Semiconductors - Heating and photoionization of silicon structures at laser treatments
Bayazitov, R.M.Year:
2009
Language:
english
DOI:
10.1109/rtp.2009.5373466
File:
PDF, 346 KB
english, 2009