![](/img/cover-not-exists.png)
[IEEE 2006 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2006.10.29-2006.12.1)] 2006 IEEE International Conference on Semiconductor Electronics - Characterization of Contact Etching Profile for 0.35um Analog Mixed Signal Product Development
Zoolfakar, Ahmad Sabirin, Zain, Azlina MohdYear:
2006
Language:
english
DOI:
10.1109/smelec.2006.381080
File:
PDF, 2.09 MB
english, 2006