Nonhermetic Encapsulation Materials for MEMS-Based Movable...

Journal of Microelectromechanical Systems 2009 / 12 Vol. 18; Iss. 6

Nonhermetic Encapsulation Materials for MEMS-Based Movable Microelectrodes for Long-Term Implantation in the Brain

Jackson, N., Anand, S., Okandan, M., Muthuswamy, J.
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Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2030075
Date:
December, 2009
File:
PDF, 994 KB
english, 2009
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