[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Monolithic dielectric BST infrared sensor arrays using a novel silicon-ferroelectric integration scheme based on improved porous silicon micromachining
Liang Dong,, Ruifeng Yue,, Litian Liu,Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290650
File:
PDF, 332 KB
english, 2004