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[IEEE 52nd Annual Device Research Conference - Boulder, CO (June 20-22, 1994)] 52nd Annual Device Research Conference - "A sub-0.25μm symmetric super self-aligned gate hjfet witn reduced gate fringing capacitance fabricated using electroless au plating and collimated sputtering"
Wada, S., Tokushima, M., Fukaishi, M., Matsuno, N., Yano, H., Hida, H.Year:
1994
Language:
english
DOI:
10.1109/drc.1994.1009449
File:
PDF, 242 KB
english, 1994