A new edge-detected lift force flow sensor

Journal of Microelectromechanical Systems 2003 / 06 Vol. 12; Iss. 3

A new edge-detected lift force flow sensor

Svedin, N., Kalvesten, E., Stemme, G.
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Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.807479
Date:
June, 2003
File:
PDF, 1.62 MB
english, 2003
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