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[IEEE 2012 Conference on Precision Electromagnetic Measurements (CPEM 2012) - Washington, DC, USA (2012.07.1-2012.07.6)] 2012 Conference on Precision electromagnetic Measurements - Study of dry etching process using SF6 and CF4/O2 for Nb/NbxSi1−x/Nb Josephson-junction fabrication
Zhong, Qing, Cao, Wenhui, Li, Jinjin, Zhong, Yuan, Wang, XueshenYear:
2012
Language:
english
DOI:
10.1109/cpem.2012.6250653
File:
PDF, 395 KB
english, 2012