CHARACTERIZATION OF A PLASMA SPUTTER DEPOSITION PROCESS BY...

Quality Engineering 2000 / 01 Vol. 12; Iss. 3

CHARACTERIZATION OF A PLASMA SPUTTER DEPOSITION PROCESS BY FRACTIONAL FACTORIAL DESIGN

Buncick, Milan C., Ralston, Andrew R. K., Denton, Denice D., Bisgaard, SØren
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Volume:
12
Language:
english
Journal:
Quality Engineering
DOI:
10.1080/08982110008962601
Date:
January, 2000
File:
PDF, 992 KB
english, 2000
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