[IEEE 2009 Spanish Conference on Electron Devices (CDE) - Santiago de Compostela, Spain (2009.02.11-2009.02.13)] 2009 Spanish Conference on Electron Devices - Growth of Silicon Nitride on Silicon by Electron Cyclotron Resonance Plasma Nitridation
del Prado, A., Toledano-Luque, M., Andres, E. San, Feijoo, P. C., Lucia, M. L.Year:
2009
Language:
english
DOI:
10.1109/sced.2009.4800418
File:
PDF, 793 KB
english, 2009